Electrical conductivity measurement methods, including contact state detection method and electrical conductivity measurement system that includes contact state detecting device, contact state detection method, contact state detection computer program, the contact state detecting device

摘要

Electrical conductivity with a contact state detecting device and the contact state detector can detect the pressed state of the contacted object of the contact body with high accuracy with a simple structure without damaging the contacted object and the contact body such as a probe I will provide a measurement system. Contact detecting device applied to an electric conductivity measuring system 100 includes a contact body approach section 123, the probe light source 131, a computer device 140 and imaging device 135. Contact body approach section 123 displaces toward the contacted object WK while maintaining the contact member 110 in a position intersecting the contact surface of the contacted object WK. Probe light source 131 emits light toward the contact member 110 to be displaced toward the contacted object WK. Image sensor 135 outputs to the computer device 140 contact body captured image data by imaging the contact body 110 is irradiated with light. Computer system 140 detects the pressing state to the contacted object WK of the contact body 110 based on the change of the contact body captured image information. Figure 1