Light beam branching device, irradiation device, light beam branching method, electronic device manufacturing method, and precision component manufacturing method

摘要

PPROBLEM TO BE SOLVED: To provide a light beam splitting device in which variation in a distribution rate due to change over time is suppressed, and to provide an irradiation device, a splitting method of a light beam, a method for manufacturing an electronic device and a method for manufacturing precision components. PSOLUTION: The light beam splitting device includes: a first array lens which is disposed on an optical path of the light beam; a second array lens which is disposed on an optical path on an exit side of the first array lens, divides the light beam to a plurality of the beams cooperatively with the first array lens, and makes the in-plane distribution of the energy intensity at the section of the light beam nearly uniform; a first condenser lens which is disposed on the optical path on an exit side of the second array lens, condenses the light beam emitted from the second array lens, and superposes the beams together, thereby shaping the light beam into the rectangular beam having nearly uniform in-plane distribution of the energy intensity: and a first dividing lens which is disposed on the optical path on the exit side of the first condenser lens, has a plurality of lenses provided in combination, and splits the beams for each light beam made incident on each of the plurality of the lenses. PCOPYRIGHT: (C)2009,JPO&INPIT