Being provided in the analytical instrument null wire, and the wire support component and the aforementioned

摘要

PROBLEM TO BE SOLVED: To collect trace foreign bodies of several micrometers that cause defects in devices, and the like, and perform mass spectrometry that is free of contaminants and satisfactory in the S/N.;SOLUTION: A trace sample heating probe includes a sample-holding section constituted of two members, having different diameters, a support section and a terminal section. The sample-holding section, having a heating mechanism in a small portion thereof, is such that only an area of the sample-holding section that is very close to a trace sample to be analyzed is heated. Hence, even if the probe has contaminants adhering thereto, these contaminants will not be heated so that noise is not generated. This enables analyses that are quite satisfactory in the S/N.;COPYRIGHT: (C)2009,JPO&INPIT