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Method of Processing Wafers for Saving Material and Protecting Environment

机译:晶片加工的方法,以节省材料和保护环境

摘要

A method of processing wafers for saving material and protecting environment is implemented to collect defective or incomplete wafers and perform cutting operation to create a plurality of separate dies. According to the requirement of a specification, the backs of the dies are grinded to allow each die to have a predetermined thickness. Thereafter, the grinded dies with completeness are sequentially placed onto a carrying means. With the method, the defective or incomplete wafers, which would be discarded in general wafer manufacturing, may be reclaimed to go through cutting, grinding, and selecting operations, so that the dies with completeness on the defective wafers can be picked out and processed again, so as to increase the yield, lower the manufacturing cost, reduce the amount of the wafer waste, increase the wafer utilization, and meet the demands of energy saving, carbon reduction, and environmental protection.
机译:一种用于节省材料和保护环境的处理晶片的方法被实现为收集有缺陷的或不完整的晶片并执行切割操作以产生多个单独的管芯。根据规格要求,对模具的背面进行研磨以使每个模具具有预定的厚度。此后,将完整的研磨模具依次放置在承载装置上。利用该方法,可以回收在一般晶片制造中将被丢弃的有缺陷或不完整的晶片,以进行切割,研磨和选择操作,从而可以挑选出有缺陷的晶片上完整的裸片并再次进行处理。从而提高了产量,降低了制造成本,减少了晶圆浪费量,提高了晶圆利用率,满足了节能,减碳,环保的要求。

著录项

  • 公开/公告号US2013217208A1

    专利类型

  • 公开/公告日2013-08-22

    原文格式PDF

  • 申请/专利权人 CHIH-HAO CHEN;

    申请/专利号US201213400587

  • 发明设计人 CHIH-HAO CHEN;

    申请日2012-02-21

  • 分类号H01L21/78;

  • 国家 US

  • 入库时间 2022-08-21 16:51:55

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