HYBRID VARIABLE CAPACITOR, RF APPARATUS, METHOD FOR MANUFACTURING HYBRID VARIABLE CAPACITOR AND METHOD FOR TUNING VARIABLE CAPACITOR

摘要

Disclosed herein are a hybrid variable capacitor, an RF apparatus, a method for manufacturing a hybrid variable capacitor, and a method for tuning a variable capacitor. The hybrid variable capacitor used in a tunable matching network includes: a metal-insulator-metal (MIM) cap array including one or more MIM capacitors and having varied capacitance equivalent to values of a lower-bit region among digital values corresponding to capacitance to be tuned; and a MOS varactor connected in parallel to the MIM cap array and having varied capacitance equivalent to values of an upper-bit region among the digital values.