HYBRID VARIABLE CAPACITOR, RF APPARATUS, METHOD FOR MANUFACTURING HYBRID VARIABLE CAPACITOR AND METHOD FOR TUNING VARIABLE CAPACITOR

摘要

The present invention relates to a hybrid variable capacitors, RF devices, hybrid variable capacitor manufacturing method and a method for adjusting a variable capacitor will. According to one embodiment of the present invention, in the variable capacitor used for the adjustable matching network, at least one metal-insulator-metal (MIM) comprising a capacitor, capacitance to be adjusted of the lower bits of the digital value corresponding to the area MIM cap having an array corresponding to the variable capacitance value; And MIM cap is connected in parallel with the array, MOS varactor having a capacitance varying corresponding to the value of the upper bits of the digital value of the area; A variable capacitor comprising a hybrid is proposed. In addition, a hybrid device including an RF variable capacitor, a hybrid capacitor is a variable capacitor manufacturing method and a variable adjustment method is proposed. ;