FLEXIBLE MICROELECTRODE FOR DETECTING NEURAL SIGNALS AND A METHOD OF FABRICATING THE SAME

摘要

A flexible microelectrode for detecting neural signals and a method of fabricating the same are disclosed. The method comprises steps: growing a graphene electrode layer on a temporary substrate; growing a flexible substrate on the graphene electrode layer and patterning the flexible substrate; removing the temporary substrate but preserving the graphene electrode layer and the flexible substrate to form an electrode body; and using an insulating layer to wrap the electrode body but exposing a bio-electrode end to contact a living body and detect the signals thereof. The graphene electrode layer features high electric conductivity, high biocompatibility and low noise. The flexible substrate is bendable. Thus is improved the adherence of the skin tissue to the bio-electrode end and decreased the likelihood of skin inflammation.