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Method of promoting single crystal growth during melt growth of semiconductors

机译:在半导体的熔体生长过程中促进单晶生长的方法

摘要

The method of the invention promotes single crystal growth during fabrication of melt growth semiconductors. A growth ampoule and its tip have a semiconductor source material placed therein. The growth ampoule is placed in a first thermal environment that raises the temperature of the semiconductor source material to its liquidus temperature. The growth ampoule is then transitioned to a second thermal environment that causes the semiconductor source material in the growth ampoule's tip to attain a temperature that is below the semiconductor source material's solidus temperature. The growth ampoule so-transitioned is then mechanically perturbed to induce single crystal growth at the growth ampoule's tip.
机译:本发明的方法在熔体生长半导体的制造过程中促进单晶生长。生长安瓿及其尖端具有放置在其中的半导体源材料。将生长安瓿置于第一热环境中,该第一热环境将半导体源材料的温度升高至其液相线温度。然后,生长安瓿过渡到第二热环境,该环境导致生长安瓿尖端中的半导体源材料达到低于半导体源材料固相线温度的温度。然后,对如此转变的生长安瓿进行机械扰动,以在生长安瓿的尖端诱导单晶生长。

著录项

  • 公开/公告号US8535440B1

    专利类型

  • 公开/公告日2013-09-17

    原文格式PDF

  • 申请/专利权人 CHING-HUA SU;

    申请/专利号US20100758169

  • 发明设计人 CHING-HUA SU;

    申请日2010-04-12

  • 分类号C30B11/14;

  • 国家 US

  • 入库时间 2022-08-21 16:47:22

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