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Platinum silicide tip apices for probe-based technologies
Platinum silicide tip apices for probe-based technologies
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机译:硅基铂硅尖端技术,用于基于探针的技术
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摘要
Tips including a platinum silicide at an apex of a single crystal silicon tip are provided herein. Also, techniques for creating a tip are provided. The techniques include depositing an amount of platinum (Pt) on a single crystal silicon tip, annealing the platinum and single crystal silicon tip to form a platinum silicide, and selectively etching the platinum with respect to the formed platinum silicide.
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