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System, method and apparatus for pattern clean-up during fabrication of patterned media using forced assembly of molecules

机译:用于使用分子的强制组装在图案化介质的制造过程中进行图案清洁的系统,方法和设备

摘要

A pattern clean-up for fabrication of patterned media using a forced assembly of molecules is disclosed. E-beam lithography is initially used to write the initial patterned bit media structures, which have size and positioning errors. Nano-sized protein molecules are then forced to assemble of on top of the bits. The protein molecules have a very uniform size distribution and assemble into a lattice structure above the e-beam patterned areas. The protein molecules reduce the size and position errors in e-beam patterned structures. This process cleans the signal from the e-beam lithography and lowers the noise in the magnetic reading and writing. This process may be used to fabricate patterned bit media directly on hard disk, or to create a nano-imprint master for mass production of patterned bit media disks.
机译:公开了使用分子的强制组装来制造图案化介质的图案清理。最初使用电子束光刻来写入具有大小和位置误差的初始图案化位媒体结构。然后,迫使纳米级蛋白质分子在钻头顶部组装。蛋白质分子具有非常均匀的尺寸分布,并在电子束图案区域上方组装成晶格结构。蛋白质分子减少了电子束图案化结构的尺寸和位置误差。该过程清除了来自电子束光刻的信号,并降低了磁性读写的噪声。此过程可用于直接在硬盘上制造图案化的位媒体,或创建用于批量生产图案化的位媒体磁盘的纳米压印母版。

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