Fabrication and assembly of nanowrinkle patterns on metallic surface: a nonlithography method for nano fabrication

摘要

Motivated by wrinkles, which are ubiquitous in nature, artificial patterns with micro periods were also fabricated in stiff/soft bilayer. Since its great importance in both fundamental research and practical use, ordered periodic nanostructures fabricated by wrinkling has fascinated researchers. In this paper, the wrinkle patterns with periods from micro- to nano-scale (sub 500nm) were fabricated by choosing the appropriate metal film and optimizing the film thicknesses. The influence of metal film morphology on wrinkle pattern was studied, which is seldom mentioned in existing works. Furthermore, the wrinkle patterns were assembled by the prefabricated structures produced via nanoimprint, deposition with masks and laser scanning. Our research results show that the wrinkling of polymer/metal bilayer is a potential nano fabrication method combining conventional bottom-up with top-down nanofabricating technique.