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Diamond UV-sensor element and manufacturing method thereof, UV-sensor unit, and method of treating diamond single crystal
Diamond UV-sensor element and manufacturing method thereof, UV-sensor unit, and method of treating diamond single crystal
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机译:金刚石紫外线传感器元件及其制造方法,紫外线传感器单元以及处理金刚石单晶的方法
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摘要
A method of manufacturing a diamond UV sensor element improved with a UV/visible light blind ratio using a diamond single crystal as a light receiving portion and detecting a light based on the change of electric resistance caused by a light irradiated to the light receiving portion is provided, the method, including (1) a step of hydrogenating the surface of the diamond single crystal in an atmosphere substantially containing hydrogen, and (2) a step of forming a light receiving portion by exposing the hydrogenated surface of the diamond single crystal into an atmosphere containing ozone or active oxygen.
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