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Target for X-ray generation, X-ray generator, and method for producing target for X-ray generation
Target for X-ray generation, X-ray generator, and method for producing target for X-ray generation
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机译:X射线产生用靶,X射线产生器以及X射线产生用靶的制造方法
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摘要
A target for X-ray generation has a substrate and a target portion. The substrate is comprised of diamond and has a first principal surface and a second principal surface opposed to each other. A bottomed hole is formed from the first principal surface side in the substrate. The target portion is comprised of a metal deposited from a bottom surface of the hole toward the first principal surface. An entire side surface of the target portion is in close contact with an inside surface of the hole.
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