Target for X-ray generation, X-ray generator, and method for producing target for X-ray generation

摘要

A target for X-ray generation has a substrate (1) and a target portion (10). The substrate is comprised of diamond and has a first principal surface (1a) and a second principal surface (1b) opposed to each other. A bottomed hole (3) is formed from the first principal surface side in the substrate. The target portion is comprised of a metal deposited from a bottom surface (3a) of the hole toward the first principal surface. An entire side surface (10c) of the target portion is in close contact with an inside surface (3b) of the hole. A protecting layer (13) protecting the substrate from the electron beam is formed on the first principal surface.