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gas sensor device operating by surface waves photonic structure of bloch and relative manufacturing process

机译:表面波操作的气体传感器器件的光子结构及其制造工艺

摘要

A gas-sensing device having a photonic structure, which comprises a multilayer structure (39) made of porous material comprising a periodic multilayer (22; 32) configured for generating Bloch surface waves, and means (23; 33) for directing a light beam (25; 36) incident upon said device (30) towards said multilayer structure (22; 32) in attenuated-total-reflection (ATR) conditions in order to generate said Bloch surface waves, said periodic multilayer (22; 32) comprising a first sensitive face (32e) that is free so as to be exposed to the gas, and a second face (32f) opposite to said first sensitive face (32e). According to the invention, said second face (32f) of said periodic multilayer (32) is set facing said means (33) for directing the incident light beam (36) in ATR conditions, and said multilayer structure (32) made of porous material is fixed to said means (33) for directing the incident light beam (36) in ATR conditions via a bonding layer (34) and a transparent substrate layer (31).
机译:一种具有光子结构的气体传感装置,其包括由多孔材料制成的多层结构(39),该多层结构包括构造为产生Bloch表面波的周期性多层(22; 32),以及用于引导光束的装置(23; 33)。 (25; 36)在衰减全反射(ATR)条件下朝着所述多层结构(22; 32)入射到所述装置(30)以产生所述Bloch表面波,所述周期性多层(22; 32)包括第一敏感面(32e)是自由的以便暴露于气体,以及与所述第一敏感面(32e)相对的第二面(32f)。根据本发明,所述周期性多层(32)的所述第二面(32f)被设置成面对所述用于在ATR条件下引导入射光束(36)的装置(33),并且所述多层结构(32)由多孔材料制成固定在所述装置(33)上的装置用于通过粘合层(34)和透明衬底层(31)在ATR条件下引导入射光束(36)。

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