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gas sensor device operating by surface waves photonic structure of bloch and relative manufacturing process
gas sensor device operating by surface waves photonic structure of bloch and relative manufacturing process
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机译:表面波操作的气体传感器器件的光子结构及其制造工艺
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摘要
A gas-sensing device having a photonic structure, which comprises a multilayer structure (39) made of porous material comprising a periodic multilayer (22; 32) configured for generating Bloch surface waves, and means (23; 33) for directing a light beam (25; 36) incident upon said device (30) towards said multilayer structure (22; 32) in attenuated-total-reflection (ATR) conditions in order to generate said Bloch surface waves, said periodic multilayer (22; 32) comprising a first sensitive face (32e) that is free so as to be exposed to the gas, and a second face (32f) opposite to said first sensitive face (32e). According to the invention, said second face (32f) of said periodic multilayer (32) is set facing said means (33) for directing the incident light beam (36) in ATR conditions, and said multilayer structure (32) made of porous material is fixed to said means (33) for directing the incident light beam (36) in ATR conditions via a bonding layer (34) and a transparent substrate layer (31).
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