VAPOR DEPOSITION METHOD OF ORGANIC POLYMER THIN FILM, AND PREPARATION METHOD OF ENCAPSULATION FILM USING SAME

摘要

According to one embodiment of the present invention, provided is a preparation method of an encapsulation film under vapor phase conditions, comprising the steps of: providing a monomer on an inorganic film constituting the encapsulation film in a reactor; providing an initiator in the reactor; thermally decomposing the initiator to form a free radical; and activating the monomer using the free radical so as to form an organic polymer thin film on the inorganic film, wherein the encapsulation film is an organic-inorganic composite film, a solvent is not used in the steps, and a process for forming the inorganic film and a step for forming the organic polymer thin film are carried out in a single vacuum process.