MEMS microphone with overtravel stop structure

摘要

A MEMS microphone (100) includes a membrane (400), a spring (405), and a first layer having a backplate (515), and a first OTS structure (415). The spring (405) has a first end (408) coupled to the membrane (400), and a second end (413) mounted to a support. The first OTS structure (415) is released from the backplate (515) and coupled to a structure other than the backplate, and is configured to stop movement of the membrane (400) in a first direction after the membrane (400) has moved a predetermined distance.