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TIN SULFIDE PRECURSOR, THIN FILM USING TIN SULFIDE PRECURSOR, AND PREPARATION METHOD THEREFOR

机译:硫化锡前驱体,使用硫化锡前驱体的薄膜及其制备方法

摘要

The present invention relates to a tin sulfide precursor and a thin film prepared using the precursor, the tin sulfide precursor comprising: Sn, a central atom; a first atom group covalently bonded to the central atom; and a second atom group coordinate-covalently bonded to the central atom, wherein the first atom group is S, the second atom group is one or more selected from a group consisting of S and N, and an atom belonging to the first atom group satisfies condition (1) or (2), wherein (1) the atoms belonging to the first atom group are connected to each other to form a cyclic structure, or (2) the atom belonging to the first atom group and the atom belonging to the second atom group are connected to each other to form a cyclic structure, and the atoms belonging to the first atom group and the second atom group are independently substituted or unsubstituted with a C1-C4 alkyl group. A high-purity tin sulfide thin film can be prepared, and the prepared thin film can be used as various electronic materials.
机译:本发明涉及一种硫化锡前体和使用该前体制备的薄膜,该硫化锡前体包含:Sn,中心原子;和与中心原子共价键合的第一原子团;第一原子团为S,第二原子团为选自由S和N组成的组中的一个或多个,并且满足第一原子团的原子满足中心原子配位共价键合的第二原子团条件(1)或(2),其中(1)属于第一原子组的原子相互连接形成环状结构,或(2)属于第一原子组的原子和属于第一原子组的原子第二原子团相互连接形成环状结构,属于第一原子团和第二原子团的原子独立地被C 1 -C 4取代或未被取代烷基。可以制备高纯度的硫化锡薄膜,并且所制备的薄膜可以用作各种电子材料。

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