Mass Transport of β-Diketonate Precursors for MOCVD of YBa_2Cu_3O_(7-δ) High T_c Superconducting Thin Films

摘要

Mass transport of Y(dpm)2 Ba(dpm)5· OH· 2Ho and Cu (dpm)2 by a carrier gas(argon) was theoretically considered and experimentally studied as a function of the system with operating parameters including temperature, carrier gas flow rate and system pressure. The experimental results are in a good agreement with the theoretical prediction. The mechanism of mass transport of these organometallic precursors and their use for YBCO film stoichiometry control and reproducibility are discussed.