CONTROLLER, STAGE DEVICE, EXPOSURE DEVICE, AND CONTROL METHOD

摘要

A controller is provided with: a control object (P(s)) having a stage on which an object is placed, a first member, and a second member connected to the stage and capable of moving in relation to the first member; a first filter (1-BPF(s)) for feeding back information related to the stage position of the control object in a frequency range that does not include the main resonance frequency in the frequency characteristics of the control object; and a second filter (BPF(s)) for feeding back information related to the position of the second member in a frequency range including the main resonance frequency in the frequency characteristics of the control object.