STAGE DEVICE, DESIGNING METHOD FOR STAGE CONTROLLER, AND EXPOSURE DEVICE

摘要

PROBLEM TO BE SOLVED: To improve the control performance of a stage.;SOLUTION: According to measured results (y4, y5, and y6) obtained by movement information measuring instruments (25X1, 25X2, and 25Y) and target values (PX0, PY0) of movement information on the stage, H∞ compensators (36X, 36Y) control the movement of the stage with good disturbance suppressing characteristics and robust stability and according to the target values (PX0, PY0) of the movement information on the stage, feedforward compensators (34X, 34Y) control the movement of the stage with good target-value follow-up characteristics. Consequently, the movement of the stage can be controlled with the good disturbance suppressing characteristics, robust stability, and target-value follow-up characteristics.;COPYRIGHT: (C)2002,JPO