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Bolometric detector for electromagnetic radiation in the terahertz spectral band and detector matrix comprising such detectors

机译:用于太赫兹光谱带中的电磁辐射的容积探测器和包括这种探测器的探测器矩阵

摘要

The detector (100) has a thermometric element (128) coupled with a resistive load (116). A reflective assembly comprises a reflective layer (132) for electromagnetic radiation. An insulating material layer (130) is formed on the reflective layer. A periodic array (104) of metallic patterns is formed on the insulating material layer, where pitch and filing factor of the array are selected to obtain a constructive interference at a level of a micro-bridge (106) between the detected incident radiation and the radiation reflected by the reflective assembly.
机译:检测器(100)具有与电阻负载(116)耦合的测温元件(128)。反射组件包括用于电磁辐射的反射层(132)。在反射层上形成绝缘材料层(130)。在绝缘材料层上形成金属图案的周期性阵列(104),在其中选择阵列的间距和填充因子,以获得在检测到的入射辐射与入射光之间的微桥(106)处的相长干涉。反射组件反射的辐射。

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