首页> 外国专利> High-Sensitive Measuring Method and Apparatus for Self-Assembly Monolayer on Gold Surface using Infrared Reflection and Self-Assembly Substrate

High-Sensitive Measuring Method and Apparatus for Self-Assembly Monolayer on Gold Surface using Infrared Reflection and Self-Assembly Substrate

机译:使用红外反射和自组装基底的金表面自组装单层的高灵敏度测量方法和设备

摘要

The present invention relates to a method highly sensitive measurements in the self-assembled layer above the gold thin film formation process using infrared spectroscopy and relates to a self-assembled layer forming device and its base material used, and more specifically by using a 3-nm gold layer forming the self-assembled film is formed under the substrate on both sides of the silicon, which has a rectangular cross-section of the self-assembled layer over the gold film This growth will be so easily done. In addition, the self-assembled layer is irradiated with light from the infrared light source at an angle to form a self-assembled monolayer formed inside the substrate, and the light emitted from the multiple reflections between two gold thin layer of self-assembled growth of self-assembled layer by an amplified signal would like to enable this without the need for highly skilled technique for precise measurements to determine the level of the substrate and the measuring method and apparatus that can improve the quality and bio-chip manufacturing time shortened by the self-assembled layer growth. ;
机译:本发明涉及一种使用红外光谱法在金薄膜形成工艺之上的自组装层中的高灵敏度测量的方法,并且涉及一种自组装层形成装置及其所用的基材,更具体地,涉及通过使用3-形成自组装膜的纳米金层形成在硅两侧的衬底下方,该硅层在金膜上具有自组装层的矩形横截面。如此容易进行生长。另外,自组装层以一定角度被来自红外光源的光照射,以形成形成在基板内部的自组装单层,并且由两次反射产生的光在自组装的两个金薄层之间生长。通过放大的信号对自组装层进行成像,无需高技能的精确测量来确定基板水平的技术,以及能够提高质量和缩短生物芯片制造时间的测量方法和设备,就可以实现这一点。自组装层的生长。 ;

著录项

  • 公开/公告号KR101197140B1

    专利类型

  • 公开/公告日2012-11-12

    原文格式PDF

  • 申请/专利权人

    申请/专利号KR20100110439

  • 发明设计人 최세범;유현웅;박민규;

    申请日2010-11-08

  • 分类号G01N21/35;G01N1/28;

  • 国家 KR

  • 入库时间 2022-08-21 16:28:16

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