DUAL SECTION MODULE HAVING SHARED AND UNSHARED MASS FLOW CONTROLLERS, WAFER PROCESSING APPRATUS COMPRISING THAT AND METHOD FOR PROCESSING WAFER USING THAT

摘要

PURPOSE: A dual section module with shared and unshared mass flow controllers, a wafer processing apparatus with the same, and a wafer processing method using the same are provided to improve space utilization by integrating a gas box with a dual chamber module. CONSTITUTION: A dual section module with shared and unshared mass flow controllers comprises dual process sections, one or more shared MFC(mass flow controller)s(4), one or more first unshared MFCs(5L), and one or more second unshared MFCs(5R). The dual process sections are integrated with each other. The shared MFCs are formed in branched gas lines and are symmetrically arranged between the dual process sections. The first unshared MFCs are formed in a gas line connected to one of the dual processor sections. The second MFCs are formed in a gas line connected to the other one of the dual processor sections.