首页>
外国专利>
METHOD AND APPARATUS FOR WASHING MOLD FOR IMPRINTING APPLICATIONS, AND PROCESS FOR PRODUCING MOLD FOR IMPRINTING APPLICATIONS
METHOD AND APPARATUS FOR WASHING MOLD FOR IMPRINTING APPLICATIONS, AND PROCESS FOR PRODUCING MOLD FOR IMPRINTING APPLICATIONS
展开▼
机译:用于印模应用的模具的方法和装置,以及用于印模应用的模具的制造过程
展开▼
页面导航
摘要
著录项
相似文献
摘要
The cleaning process of cleaning an imprinting mold including a release layer coupled via siloxane bonds to a substrate of that release layer includes a first cleaning step and a second cleaning step. In the first cleaning step, the angle of contact of the surface of the release layer with water is made small, and in the second cleaning step, the alkali cleaning agent is brought in contact with the release layer that has gone through the first cleaning step.
展开▼