STANDARD GAS DILUTION SYSTEM, CAPABLE OF AUTOMATICALLY DILUTING STANDARD GAS WITH HIGH CONCENTRATION AT DESIRED CONCENTRATION

摘要

PURPOSE: A standard gas dilution system is provided to stably dilute unstable materials and to rapidly inject the dilution gas after injecting standard gas with high concentration into a loop of a predetermined volume, thereby enabling to rapidly dilute the gas.;CONSTITUTION: A standard gas dilution system(10) comprises a first multi-path valve(100), a second multi-path valve(200), and a control unit. The first multi-path valve receives standard gas(STD) and dilution gas(N2) in the inside and discharges the same. The second multi-path valve includes one or more loops with various volumes. The second multi-path valve is connected to the first multi-path valve via a standard gas intake passage and vent passage in a standard gas intake step and via a dilution gas intake passage and a dilution gas discharge passage in a dilution mixed gas discharging step so that flowing directions of the standard gas and the dilution gas has flown into the loops are a flowing direction of the standard mixed gas being discharged through the loops. The control unit controls the rotation of the first and second multi-path valves.;COPYRIGHT KIPO 2013