APPARATUS AND METHOD FOR MEASURING AN AERIAL IMAGE OF AN EUV MASK CAPABLE OF MEASURING A SPACE IMAGE OF THE EUV MASK

摘要

PURPOSE: An apparatus for measuring an aerial image of an EUV mask is provided to improve light efficiency, and to improve quality of a space image by reducing the influence of EUV light reflected from a mask.;CONSTITUTION: An apparatus for measuring an aerial image of an EUV mask comprises: an EUV light generating part(10) generating extreme ultraviolet light; a movement part(35) which moves the EUV mask(40) along the x or y axis; a first reduction optical system(510) primarily reducing divergence of the EUV light; a second reduction optical system(540) which secondarily reduces the divergence of the EUV light to concentrate the light into the EUV mask; and a detection part(50) senses energy of EUV light reflected from all regions of the EUV mask.;COPYRIGHT KIPO 2013;[Reference numerals] (11) Light source