Apparatus and method for measuring an aerial image of EUV mask

摘要

Spatial image measuring device and the space on the image measurement start for EUV masks. Spatial image measuring apparatus according to one embodiment, the top has a reflective EUV (extreme ultra-violet) is located at the mask, the EUV reflective mask in the x-axis or y-axis direction moving unit for moving the upper parts of the mobile is located, the interference of the EUV light that reflects light of a certain wavelength by selecting X-ray mirror (mirror), located between the moving part and the X-ray mirror, the EUV light reflected by the interference of the EUV reflective mask Zone plate (zoneplate) lens for focusing on a portion, and positioned above the moving parts, if the focused EUV radiation is reflected by the interference portion of the reflective EUV mask, the interference detecting the reflected EUV light energy included a detector, wherein the zone plate lens, each of the numerical aperture of the detection and the exposure system (scanner) (numeric aperture) NA. _zoneplate. , NA. _detector. And NA. _scanner. And entry wound of the exposure system Apostle (. ) Is, NA. _zoneplate. = NA. _scanner. / 4, and NA. _detector. = NA. _scanner. / 4 *. It satisfies the relationship. ; Area image, an aerial image, a defect, the exposure process.