BIOMEDICAL PRESSURE SENSOR AND A MANUFACTURING METHOD THEREOF USING A MEMS(MICRO ELECTRO MECHANICAL SYSTEM) PROCESS

摘要

PURPOSE: A biomedical pressure sensor and a manufacturing method thereof are provided to improve accuracy of measurement by being easily operable to a small pressure range required in a human body.;CONSTITUTION: A capacitor is electrically connected to a coil inductor(10). A flexible membrane(50) is spaced apart from the coil inductor. A pressure displacement member(60) is fixed to one side of the membrane. The membrane is deformed by external pressure. The membrane changes a distance of the pressure displacement member.;COPYRIGHT KIPO 2013