MEMS(MICRO-ELECTRO MECHANICAL SYSTEM) MICROPHONE FOR ELIMINATING COMPLEX MANUFACTURING PROCESS OF A CONDENSER MICROPHONE AND A MANUFACTURING METHOD THEREOF

摘要

PURPOSE: A MEMS(Micro-Electro Mechanical System) microphone and a manufacturing method thereof are provided to obtain an excellent frequency response characteristic by minimizing an interval between a vibration plate and an electrode plate.;CONSTITUTION: A plurality of first supports(31) is arranged to be circular at a certain interval on a substrate(10). An electrode plate(20) is surrounded by a plurality of first supports and second supports(32). A plurality of penetration holes on the electrode plate and a plurality of penetration holes on the substrate are connected. Air generated by driving the vibration plate escapes to an acoustic chamber(15) on an upper side of the substrate. A small hole is corresponded to a penetration hole which is pierced on a core region of the substrate and the electrode plate. A circular protrusion portion is formed for the smooth flow of the air generated by a sound source in a driving state of the vibration plate.;COPYRIGHT KIPO 2012