CU ALLOY WIRING FILM FOR TOUCH PANEL SENSORS, A MANUFACTURING METHOD THEREOF, A TOUCH PANEL SENSOR THEREOF, AND A SPUTTERING TARGET THEREOF CAPABLE OF IMPROVING OXIDATION RESISTANCE

摘要

PURPOSE: A Cu alloy wiring film for touch panel sensors, a manufacturing method thereof, a touch panel sensor thereof, and a sputtering target thereof are provided to supply an excellent oxidation resistance effect by using Cu alloy including oxidation resistance improvement elements.;CONSTITUTION: A wiring film has a lamination structure composed of first and second layers. The first layer includes 0.1-40 atom% of the sum of alloy elements selected from a group formed of Ni, Zn, and Mn. The second layer is composed of Cu alloy with electric resistivity lower than the electric resistivity of the first layer. The first layer and/or the second layer are connected to a transparent conductive film.;COPYRIGHT KIPO 2013;[Reference numerals] (AA) Insulation film; (BB) Transparent conductive film; (CC) Substrate; (DD) First Cu alloy layer; (EE) Second Cu alloy layer