FABRICATION OF FLEXIBLE HIGH-PERFORMANCE CHEMICAL SENSOR USING METAL-DECORATED GRAPHENE HYBRID STRUCTURES THROUGH PLASMA TREATMENT

摘要

PURPOSE: A method for manufacturing a high-sensitivity flexible chemical sensor manufacturing method based on a graphene sheet composite in which metal is attached by plasma processing is provided to control properties of graphene and the number of a functional group without a separate complex surface processing process by introducing plasma. CONSTITUTION: A method for a chemical sensor comprises: a step of generating graphene by a chemical vapor deposition while gradually increasing temperature from 800-1200C; a step of stabilizing the graphene with a dry ice wind direction cooling device; a step of transferring the graphene on a flexible substrate; a step of introducing a surface functional group by plasma-processing the graphene transferred on the flexible substrate; and a step of forming a metal nano particle by using ultrasonic waves and manufacturing a nano composite by attaching the surface functional group to the metal nano particle through a coordinate bonding method. A detection member for detecting changes in electric properties of hydrogen gas is provided.