Recycling method of CMP pad conditioner having end of life and recycled CMP pad conditioner treated thereby

摘要

The invention than that for CMP pad conditioners specifically a certain pattern on the surface of the substrate during CMP pad conditioners protrusions formed in the form and the CMP pad is diamond -coated layer on the surface conditioner are diamond layer when the wear life is complete , such that the service life , which can save resources by recycling a CMP pad conditioner is a low-life end CMP pad conditioner recycling and recycling the recycling is done relates to the CMP pad conditioners. ;