Plasma doping apparatus having shadow mask and method of plasm doping using the same

摘要

PURPOSE: A plasma doping apparatus having a shadow mask and a plasma doping method using the same are provided to facilitate a doping process by forming a shadow mask in a vertical direction. CONSTITUTION: Plasma is formed in a chamber(110). A supporter(120) supports a doping object. The supporter is connected to power source(130). The power source is applied to the doping object. A shadow mask is mounted on the surface of the doping object.