Gapless point back surface field for the counter doping of large‐area interdigitated back contact solar cells using a blanket shadow mask implantation process

Kim Young‐Su; Mo Chanbin; Lee Doo Youl; Park Sung Chan; Kim Dongseop; Nam Junggyu; Yang JungYup; Suh Dongchul; Kim Hyun‐Jong; Park Hyomin; Park Se Jin; Kim Donghwan; Song Jungho; Lee Hae‐Seok; Park Sungeun; Kang Yoonmook

摘要

Abstract > Gapless interdigitated back contact (IBC) solar cells were fabricated with phosphorous back surface field on a boron emitter, using an ion implantation process. Boron emitter (boron ion implantation) is counter doped by the phosphorus back surface field (BSF) (phosphorus ion implantation) without gap. The gapless process step between the emitter and BSF was compared to existing IBC solar cell with gaps between emitters and BSFs obtained using diffusion processes. We optimized the doping process in the phosphorous BSF and boron emitter region, and the implied V <sub>oc</sub> and contact resistance relationship of the phosphorous and boron implantation dose in the counter doped region was analyzed. We confirmed the shunt resistance of the gapless IBC solar cells and the possibility of shunt behavior in gapless IBC solar cells. The highly doped counter doped BSF led to a controlled junction breakdown at high reverse bias voltages of around 7.5?V. After the doping region was optimized with the counter doped BSF and emitter, a large‐area (5?inch pseudo square) gapless IBC solar cell with a power conversion efficiency of 22.9% was made. </abstract> </span> <span class="z_kbtn z_kbtnclass hoverxs" style="display: none;">展开▼</span> </div> <div class="translation abstracttxt"> <span class="zhankaihshouqi fivelineshidden" id="abstract"> <span>机译：</span><Abstract XMLNS =“http://www.wiley.com/namespaces/wiley”type =“main”xml：lang =“en”> <标题类型=“main”>抽象</ title> > 使用离子注入工艺，在硼发射器上用磷背面场制造无透视的反触点（IBC）太阳能电池。硼发射器（硼离子注入）被磷背面（BSF）（BSF）（磷离子注入）掺杂而没有间隙。将发射器和BSF之间的无形处理步骤与现有的IBC太阳能电池进行比较，其中使用扩散过程获得的发射器和BSF之间的间隙。我们优化了磷BSF和硼发射器区域的掺杂过程，以及隐含的V. <sub> oc </ sub> 分析了反掺杂区中磷和硼植入剂量的接触电阻关系。我们确认了无形IBC太阳能电池的分流阻力以及长期IBC太阳能电池中分流行为的可能性。高掺杂的计数器掺杂BSF在大约7.5Ω·v的高反向偏置电压下导致受控结击。用计数器掺杂BSF和发射器优化掺杂区域之后，制造具有电力转换效率为22.9％的大面积（5？英寸伪平方）的无杆IBC太阳能电池。 </ p> </摘要> </span> <span class="z_kbtn z_kbtnclass hoverxs" style="display: none;">展开▼</span> </div> </div> <div class="record"> <h2 class="all_title" id="enpatent33" >著录项</h2> <ul> <li> <span class="lefttit">来源</span> <div style="width: 86%;vertical-align: text-top;display: inline-block;"> <a href='/journal-foreign-29870/'>《Progress in photovoltaics》</a> <b style="margin: 0 2px;">|</b><span>2017年第12期</span><b style="margin: 0 2px;">|</b><span>共7页</span> </div> </li> <li> <div class="author"> <span class="lefttit">作者</span> <p id="fAuthorthree" class="threelineshidden zhankaihshouqi"> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Kim Young‐Su&option=202" target="_blank" rel="nofollow">Kim Young‐Su;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Mo Chanbin&option=202" target="_blank" rel="nofollow">Mo Chanbin;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Lee Doo Youl&option=202" target="_blank" rel="nofollow">Lee Doo Youl;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Park Sung Chan&option=202" target="_blank" rel="nofollow">Park Sung Chan;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Kim Dongseop&option=202" target="_blank" rel="nofollow">Kim Dongseop;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Nam Junggyu&option=202" target="_blank" rel="nofollow">Nam Junggyu;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Yang JungYup&option=202" target="_blank" rel="nofollow">Yang JungYup;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Suh Dongchul&option=202" target="_blank" rel="nofollow">Suh Dongchul;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Kim Hyun‐Jong&option=202" target="_blank" rel="nofollow">Kim Hyun‐Jong;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Park Hyomin&option=202" target="_blank" rel="nofollow">Park Hyomin;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Park Se Jin&option=202" target="_blank" rel="nofollow">Park Se Jin;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Kim Donghwan&option=202" target="_blank" rel="nofollow">Kim Donghwan;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Song Jungho&option=202" target="_blank" rel="nofollow">Song Jungho;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Lee Hae‐Seok&option=202" target="_blank" rel="nofollow">Lee Hae‐Seok;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Park Sungeun&option=202" target="_blank" rel="nofollow">Park Sungeun;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Kang Yoonmook&option=202" target="_blank" rel="nofollow">Kang Yoonmook;</a> </p> <span class="z_kbtnclass z_kbtnclassall hoverxs" id="zkzz" style="display: none;">展开▼</span> </div> </li> <li> <div style="display: flex;"> <span class="lefttit">作者单位</span> <div style="position: relative;margin-left: 3px;max-width: 639px;"> <div class="threelineshidden zhankaihshouqi" id="fOrgthree"> <p>Solar Energy Development GroupSamsung SDIYongin‐si Gyunggi‐do South Korea;</p> <p>Solar Energy Development GroupSamsung SDIYongin‐si Gyunggi‐do South Korea;</p> <p>Solar Energy Development GroupSamsung SDIYongin‐si Gyunggi‐do South Korea;</p> <p>Solar Energy Development GroupSamsung SDIYongin‐si Gyunggi‐do South Korea;</p> <p>Solar Energy Development GroupSamsung SDIYongin‐si Gyunggi‐do South Korea;</p> <p>Solar Energy Development GroupSamsung SDIYongin‐si Gyunggi‐do South Korea;</p> <p>Department of PhysicsKunsan National UniversityGeonbuk South Korea;</p> <p>Department of Chemical EngineeringHoseo UniversityAsan South Korea;</p> <p>Solar Energy Development GroupSamsung SDIYongin‐si Gyunggi‐do South Korea;</p> <p>Department of Materials Science and EngineeringKorea UniversitySeoul South Korea;</p> <p>Department of Materials Science and EngineeringKorea UniversitySeoul South Korea;</p> <p>Department of Materials Science and EngineeringKorea UniversitySeoul South Korea;</p> <p>KU‐KIST Green School Graduate School of Energy and EnvironmentKorea UniversitySeoul South Korea;</p> <p>KU‐KIST Green School Graduate School of Energy and EnvironmentKorea UniversitySeoul South Korea;</p> <p>Department of Materials Science and EngineeringKorea UniversitySeoul South Korea;</p> <p>KU‐KIST Green School Graduate School of Energy and EnvironmentKorea UniversitySeoul South Korea;</p> </div> <span class="z_kbtnclass z_kbtnclassall hoverxs" id="zhdw" style="display: none;">展开▼</span> </div> </div> </li> <li > <span class="lefttit">收录信息</span> <span style="width: 86%;vertical-align: text-top;display: inline-block;"></span> </li> <li> <span class="lefttit">原文格式</span> <span>PDF</span> </li> <li> <span class="lefttit">正文语种</span> <span>eng</span> </li> <li> <span class="lefttit">中图分类</span> <span><a href="https://www.zhangqiaokeyan.com/clc/7667.html" title="通信系统（传输系统）">通信系统（传输系统）;</a><a href="https://www.zhangqiaokeyan.com/clc/1790.html" title="光电子技术、激光技术">光电子技术、激光技术;</a></span> </li> <li class="antistop"> <span class="lefttit">关键词</span> <p style="width: 86%;vertical-align: text-top;"> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=counter doping&option=203" rel="nofollow">counter doping;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=gapless doping&option=203" rel="nofollow">gapless doping;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=IBC solar cells&option=203" rel="nofollow">IBC solar cells;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=ion implantation&option=203" rel="nofollow">ion implantation;</a> </p> <div class="translation"> 机译：反掺杂;无光血掺杂;IBC太阳能电池;离子植入; </div> </li> </ul> </div> </div> <div class="literature cardcommon"> <div class="similarity "> <h3 class="all_title" id="enpatent66">相似文献</h3> <div class="similaritytab clearfix"> <ul> <li class="active" >外文文献</li> <li >中文文献</li> <li 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href="/academic-degree-domestic_mphd_thesis/020315210210.html">碳点掺杂对反溶剂法制备钙钛矿薄膜及太阳能电池性能的影响</a> <b>[A] </b> <span> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=朱晓萌&option=202" target="_blank" rel="nofollow" class="tuijian_auth tuijian_authcolor"> . 朱晓萌</a> <span> . 2019</span> </span> </div> </li> </ul> <ul style="display: none;"> <li> <div> <b>1. </b><a class="enjiyixqcontent" href="/patent-detail/06120896512.html">背面具有细长交叉指状发射极区域和基极区域的背接触式太阳能电池及其生产方法</a> <b>[P]</b> . <span> 中国专利： CN101952972B </span> <span> . 2012.02.15</span> </div> </li> <li> <div> <b>2. </b><a class="enjiyixqcontent" href="/patent-detail/06120106156197.html">背面具有细长交叉指状发射极区域和基极区域的背接触式太阳能电池及其生产方法</a> <b>[P]</b> . <span> 中国专利： CN101952972A </span> <span> . 2011-01-19</span> </div> </li> <li> <div> <b>3. </b><a class="enjiyixqcontent" href="/patent-detail/06130473839753.html">Silicon solar cell metallisation with chemically sculptured surface - uses metallisation of contacts post surface doping as mask for chemical etch to remove surface traps and reduce absorption in face layer</a> <b>[P]</b> . <span> 外国专利：  FR2499316B1 </span> <span> . 1983-11-18</span> </div> <p class="zwjiyix translation" style="max-width: initial;height: auto;word-break: break-all;white-space: initial;text-overflow: initial;overflow: initial;"> <span>机译：具有化学雕刻表面的硅太阳能电池金属化-使用表面掺杂后的触点金属化作为化学蚀刻的掩模，以去除表面陷阱并减少表面层的吸收 </span> </p> </li> <li> <div> <b>4. </b><a class="enjiyixqcontent" href="/patent-detail/06130476212790.html">Silicon solar cell metallisation with chemically sculptured surface - uses metallisation of contacts post surface doping as mask for chemical etch to remove surface traps and reduce absorption in face layer</a> <b>[P]</b> . <span> 外国专利：  FR2499316A1 </span> <span> . 1982-08-06</span> </div> <p class="zwjiyix translation" style="max-width: initial;height: auto;word-break: break-all;white-space: initial;text-overflow: initial;overflow: initial;"> <span>机译：具有化学雕刻表面的硅太阳能电池金属化-使用表面掺杂后的触点金属化作为化学蚀刻的掩模，以去除表面陷阱并减少表面层的吸收 </span> </p> </li> <li> <div> <b>5. </b><a class="enjiyixqcontent" href="/patent-detail/06130418563239.html">Interdigitated back contact solar cell and method for manufacturing the interdigitated back contact solar cell</a> <b>[P]</b> . <span> 外国专利：  JP5567806B2 </span> <span> . 2014-08-06</span> </div> <p class="zwjiyix translation" style="max-width: initial;height: auto;word-break: break-all;white-space: initial;text-overflow: initial;overflow: initial;"> <span>机译：叉指背接触太阳能电池及其制造方法 </span> </p> </li> </ul> </div> </div> </div> <div class="theme cardcommon" style="overflow: auto;display:none"> <h3 class="all_title" id="enpatent55">相关主题</h3> <ul id="subject"> </ul> </div> </div> </div> </div> <div class="right rightcon"> <div class="details_img cardcommon clearfix" style="margin-bottom: 10px;display:none;" > </div> </div> </div> <div id="thesis_get_original1" class="downloadBth" style="bottom: 19px;z-index: 999;" 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