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ALLOTROPIC OR MORPHOLOGIC CHANGE IN SILICON INDUCED BY ELECTROMAGNETIC RADIATION FOR RESISTANCE TUNING OF INTEGRATED CIRCUITS
ALLOTROPIC OR MORPHOLOGIC CHANGE IN SILICON INDUCED BY ELECTROMAGNETIC RADIATION FOR RESISTANCE TUNING OF INTEGRATED CIRCUITS
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机译:电磁辐射引起的硅的同素异形或形态变化,用于集成电路的电阻调整
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摘要
electronic device includes a semiconductor substrate and the dielectric substrate . Resists link disposed on the substrate includes a first zone and a second resistance zone resistance . First resistance zone has a first resistivity and a first morphology . Second resistance zone has a second resistivity and a different second type .
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