PRESSURE SENSOR BASED ON NANO- AND MICROELECTROMECHANICAL SYSTEM OF INCREASED ACCURACY AND RELIABILITY

摘要

FIELD: measurement equipment.;SUBSTANCE: pressure sensor based on a nano- and microelectromechanical system of increased accuracy and reliability comprises a body, a nano- and microelectromechanical system (NMEMS) installed in it and made in the form of two membranes with a rigid centre connected to each other with a force-transmitting stem, a heterogeneous structure of thin films of materials formed on the planer side of the second membrane, and in this structure there are the first and second radial strain sensors connected with thin-film links included into a measurement bridge. The first radial strain sensors are placed between the rigid centre and the circumference, the radius of which R is determined in accordance with the appropriate ratio. The second radial strain elements are placed between the support base of the membrane and the circumference, the radius of which R is determined in accordance with the appropriate ratio.;EFFECT: improved accuracy, higher reliability and increased manufacturability of a pressure sensor.;5 dwg