MINIMIZATION OF THE EFFECT OF TEMPERATURE ON THIN-FILM NANO- AND MICROELECTROMECHANICAL SYSTEMS AND PRESSURE SENSORS BASED ON THEM

E. M. Belozubov; V. A. Vasilev; N. V. Gromkov

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MINIMIZATION OF THE EFFECT OF TEMPERATURE ON THIN-FILM NANO- AND MICROELECTROMECHANICAL SYSTEMS AND PRESSURE SENSORS BASED ON THEM

机译：最小化薄膜纳米和微机电系统的温度影响以及基于它们的压力传感器

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摘要

Methods for minimizing the effect of temperature on thin-film nano- and microelectromechanical systems and pressure sensors based on them are summarized. Properties are provided and different methods are described. Conclusions are derived from analyzing the methods about requirements for their comprehensive use.

机译：总结了最小化温度对薄膜纳米和微机电系统以及基于它们的压力传感器的影响的方法。提供了属性并描述了不同的方法。通过分析有关全面使用需求的方法得出结论。

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来源
《Measurement techniques》 |2009年第8期|853-858|共6页
作者
E. M. Belozubov; V. A. Vasilev; N. V. Gromkov;
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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
原文格式 PDF
正文语种 eng
中图分类
关键词
nano- and microelectromechanical systems; thin films; tensoresistor; sensor; pressure;

机译：纳米和微机电系统;薄膜;拉伸电阻传感器;压力;
入库时间 2022-08-17 13:11:17

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1. Problems and Basic Research Directions in the Field of Thin-film Nano- and Microelectromechanical Systems of Pressure Sensors [J] . E. M. Belozubov, V. A. Vasilev, N. V. Gromkov Automation and Remote Control . 2011,第2期

机译：薄膜纳米和微机电系统压力传感器领域中的问题和基础研究方向
2. THIN-FILM NANO- AND MICRO-ELECTROMECHANICAL SYSTEMS - THE BASIS OF CONTEMPORARY AND FUTURE PRESSURE SENSORS FOR ROCKET AND AVIATION ENGINEERING [J] . E. M. Belozubov, V. A. Vasilev, N. V. Gromkov Measurement techniques . 2009,第7期

机译：薄膜纳米和微机电系统-火箭和航空工程的当代和未来压力传感器的基础
3. Simulation of capacitive pressure sensor based on microelectromechanical systems technology [J] . Baghelani Masoud, Hosseini-Sianaki Ahmad, Behzadi Zeinab, Proceedings of the Institution of Mechanical Engineers, Part C. Journal of mechanical engineering science . 2018,第9期

机译：基于微机电系统技术的电容式压力传感器仿真
4. Performance evaluation of a lead-titanate (PbTiO3) pyroelectric thin-film infrared sensor with temperature isolation improvement structure by microelectromechanical system (MEMS) technologies [C] . Jyh-Jier Ho, Fortune Junior College of Technology Commerce, Kaohsiung, Conference on optoelectronic materials and devices . 1998

机译：微机电系统（MEMS）技术对具有温度隔离改善结构的钛酸铅（PbTiO3）热电薄膜红外传感器的性能评估
5. A flush-mounted microelectromechanical system (MEMS) pressure- and flow-sensor-based air data system. [D] . Black, Richard Allyn. 1999

机译：齐平安装的微机电系统（MEMS）基于压力和流量传感器的空气数据系统。
6. An electric impedance based microelectromechanical system flow sensor for ionic solutions [O] . H Edward Ayliffe, RD Rabbitt -1

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7. Ultrasensitive Thin-Film Pressure Sensors with a Broad Dynamic Response Range and Excellent Versatility Toward Pressure Vibration, Bending, and Temperature [O] . -1

机译：超敏感的薄膜压力传感器，具有宽的动态响应范围和朝向压力振动，弯曲和温度的优异多功能性
8. Microelectromechanical System Pressure Sensor for Projectile Applications [R] . Zakar, E. 2004

机译：用于弹丸应用的微机电系统压力传感器

MINIMIZATION OF THE EFFECT OF TEMPERATURE ON THIN-FILM NANO- AND MICROELECTROMECHANICAL SYSTEMS AND PRESSURE SENSORS BASED ON THEM

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