Torque-measuring device for use in dynamometer used for determining efficiency of low-voltage asynchronous motor, has three-dimensional micro-mechanical structures of single crystal silicon, provided in bending beam at sensor

摘要

The device has shaft (8) which is rotatably mounted with respect to bearing (2). A gravity pendulum (10) and sensor (11) for converting the rotation of the shaft into a varying electrical output signal are connected with shaft. The dimensions and the mass of the gravity pendulum are determined based on the output signal of sensor. The three-dimensional micro-mechanical structures of single crystal silicon are provided in bending beam at sensor. The sensor the three-dimensional micro-mechanical structures, and electrical circuits are made of single monocrystalline silicon. An independent claim is included for method for calibration of torque measuring device.