Temp. sensor, esp. for air mass sensor - has single crystal silicon@ structure on membrane in single crystal silicon frame using Seebeck and resistance temp. effects

摘要

The sensor contains a dielectric membrane (13) mounted in a single crystal silicon frame (9). A single crystal silicon structure (11,12) applied to the membrane is used to measure the membrane temp. and has at least two leads leading out from it. The dielectric membrane can be of silicon nitride, silicon oxide or silicon oxynitride. The upper side of the membrane is covered with a dielectric protection layer. ADVANTAGE - The sensor achieves very high temp. sensitivity. (Dwg.3/3)