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A method for filtering and visualization of periodic structures on rough cylindrical surfaces

机译:一种用于过滤和可视化粗糙圆柱面上的周期性结构的方法

摘要

A method for the visualization of a periodic structure, in particular a spin structure, in a cylindrical surface of a workpiece,– in which process a laser light bundle approximately glance the cylindrical surface is irradiated and a diffraction image of the periodic structure in the secondary light reflected from the surface is generated,– and in which process the intensity distribution of the diffraction image is evaluated,characterized by the,that the laser light bundle (7) approximately in the circumferential direction on the cylindrical surface of the workpiece (3) is input andthat the expansion of the diffraction lines contained in the diffraction pattern as well as the signal - noise ratio of the diffraction image as a measure for the peak - to - valley - value of the swirl structure are used.
机译:一种可视化工件圆柱表面上的周期性结构,特别是自旋结构的方法,在该方法中,照射一束大致扫视圆柱表面的激光束,并在次级表面上显示周期性结构的衍射图产生从表面反射的光,并在此过程中评估衍射图像的强度分布,其特征在于,激光束(7)大约在圆周方向上位于工件(3)的圆柱表面上作为输入,并且使用了衍射图案中包含的衍射线的扩展以及衍射图像的信噪比,作为涡旋结构的峰谷值的度量。

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