Cylindrical inner peripheral surface periodic structure processing method and cylindrical inner peripheral surface periodic structure processing apparatus

摘要

PPROBLEM TO BE SOLVED: To provide a method and an apparatus for machining periodic construction of the inner peripheral surface of a cylinder by which the arraying machining is made possible with high accuracy without putting out of a regular shape of periodic construction (fine periodic groove and dimple) by specializing the inner peripheral surface of a cylinder of a cylindrical workpiece. PSOLUTION: The method and apparatus are characterized by conducting a femtosecond laser of linearly polarized light into a first rotary cylinder 41 which is provided rotatably, changing the polarization direction of the linearly polarized light with a /2 plate which is arranged in the first rotary cylinder, advancing the femtosecond laser in the direction of the outside diameter while condensing the femtosecond laser with a condensing lens R3 and a reflection mirror M which are arranged in a second rotary cylinder 49 which is provided rotatably by aligning the axial center O2 to the first rotary cylinder, emitting the femtosecond laser after facing the inner peripheral surface W1 of the cylindrical workpiece W and rotating the first rotary cylinder provided with the /2 plate by a half per the rotation of the rotation of the second rotary cylinder which is provided with the reflection mirror, and arraying machining the periodic groove KM in the same direction on the inner peripheral surface of the cylindrical workpiece. PCOPYRIGHT: (C)2008,JPO&INPIT