Micro-electromechanical magnetic field sensor i.e. linear magnetic field sensor, for detecting e.g. direction of three-dimensional earth's magnetic field, has conductive layer whose vibrating element is excitable relative to carrier

摘要

The sensor (10a) has an insulating layer (2) formed on an active surface of a carrier (1). Vibrating elements (4a, 4b) of a structured, conductive layer (3) are extended along a main extending direction over a recess i.e. through-hole, of the insulating layer. The elements are excitable relative to the carrier in a standing drive direction that is vertical to the extending direction, so that a magnetic field with magnetic field components (Bz) is induced in a plane vertical to the directions upon extension of the vibrating element by alternating current (AC) voltage. Independent claims are also included for the following: (1) a magnetic field detecting system (2) a magnetic field detecting method.