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Device for wet treatment of substrate wafer used in photovoltaic industry, has conveying elements that lies outside pools for conveying substrate wafer, so that process fluid contacts with underside of substrate wafer
Device for wet treatment of substrate wafer used in photovoltaic industry, has conveying elements that lies outside pools for conveying substrate wafer, so that process fluid contacts with underside of substrate wafer
The device (1) has several pools (5) with an inlet (11) for introducing a process fluid. A transport unit (7) transports the substrate wafers arranged one behind the other in the transport direction (A) of the transport unit over the pools. The transport unit has conveying elements that lies outside the pools for conveying the substrate wafer, so that the process fluid contacts with the underside of the substrate wafer. An independent claim is included for a method for wet treatment of substrate wafer.
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