Arrangement for optical scanning and profilometry according to light-section method, has optical illumination path and imaging path, which pass through pupil plane at two separate locations for forming slope of participating beam

摘要

The arrangement has a light source, a detector (19) and an optic (15) for generating a line projection, where an inserted single lens (23) is used for separate optical paths (3,9) for both the projection or illumination, and than is used for detection and imaging of an object (1) to be tested on the detector. The optical axes (7,11,27) of the illumination and detection paths enclose a parallax angle (13), where a telecentric lens is used as a lens. The optical illumination path and imaging path pass through a pupil plane (25) at two separate locations for forming a slope of participating beam.