Device for holding optical integrator in illumination beam path has adjustment elements for pivoting integrator about point in light entry plane relative to illumination beam path

摘要

The device has adjustment elements (25,26) for pivoting the integrator about a point in its light entry plane relative to the illumination beam path. The pivoting is carried out until a desired integration result for the illumination light is achieved. There is an arrangement for fixing the integrator in the achieved position.