首页> 外国专利> Projection arrangement has illumination optics with beam path folding deflection element, optical device above reference plane; deflection element/light modulator are below reference plane

Projection arrangement has illumination optics with beam path folding deflection element, optical device above reference plane; deflection element/light modulator are below reference plane

机译:投影装置具有照明光学器件,其具有光束路径折叠偏转元件,光学装置在参考平面上方;偏转元件/光调制器在参考平面下方

摘要

The arrangement has a source for producing an illumination field, a light modulator for producing an image, optics for illuminating the modulator with light from the illumination field and projection optics. The illumination optics have a deflection element for beam path folding and an optical device above a reference plane containing the projection optics' optical axis; the deflection element and light modulator lie below the reference plane. The arrangement has a light source for producing an illumination field, a reflective light modulator (3) for producing an image, illumination optics (2) for illuminating the modulator with light from the illumination field and projection optics (4). The illumination optics contain a deflection element (7) for folding the beam path and an optical device (5) above a reference plane containing the projection optics' optical axis; the deflection element and the light modulator lie below the reference plane.
机译:该装置具有用于产生照明场的源,用于产生图像的光调制器,用于用来自照明场的光照明调制器的光学器件和投影光学器件。照明光学器件具有用于光束路径折叠的偏转元件和在包含投影光学器件的光轴的参考平面上方的光学设备;偏转元件和光调制器位于参考平面下方。该装置具有用于产生照明场的光源,用于产生图像的反射光调制器(3),用于用来自照明场的光照明调制器的照明光学器件(2)和投影光学器件(4)。照明光学器件包括用于折叠光束路径的偏转元件(7)和在包含投影光学器件的光轴的参考平面上方的光学设备(5);偏转元件和光调制器位于参考平面下方。

著录项

  • 公开/公告号DE10136261A1

    专利类型

  • 公开/公告日2003-02-20

    原文格式PDF

  • 申请/专利权人 CARL ZEISS JENA GMBH;

    申请/专利号DE2001136261

  • 发明设计人 PIEHLER EBERHARD;

    申请日2001-07-25

  • 分类号G03B21/14;G02B27/18;

  • 国家 DE

  • 入库时间 2022-08-21 23:42:51

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