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A method for characterising of light - emitting semiconductor devices based on product wafter - characteristics

机译:一种基于乘积特征的发光半导体器件的表征方法

摘要

A method for characterising of light - emitting semiconductor devices (leds), based on product wafter - characteristics, are disclosed. The method include the measurement of at least one product wafter - charakteristikums, such as the curvature or device layer voltage. The method also comprises the setting up a relationship between the at least one characteristic and the emission wavelengths of the leds - chips or - this formed on the product wafter. The relationship makes it possible to predict the emission wavelength of the leds - structures formed in the device is similar to that of the layer of product wafers. This in turn can be used in order to characterize the product wafer and, in particular, the leds - structures formed thereon and in order to ensure a method control in the case of the leds - production with a large volume to carry out.
机译:公开了一种基于乘积后特性表征发光半导体器件(led)的方法。该方法包括测量至少一种产物,例如曲率或器件层电压。该方法还包括在至少一个特性和形成在产品w上的led芯片或芯片的发射波长之间建立关系。该关系使得可以预测led的发射波长-器件中形成的结构与产品晶圆层的结构相似。这又可以用于表征产品晶片,特别是表征在其上形成的LED的结构,并且为了确保在LED的情况下进行方法控制而进行的特征在于大批量生产。

著录项

  • 公开/公告号DE102012023353A1

    专利类型

  • 公开/公告日2013-06-13

    原文格式PDF

  • 申请/专利权人 ULTRATECH INC.;

    申请/专利号DE20121023353

  • 发明设计人 DAVID OWEN;ANDREW M. HAWRYLUK;

    申请日2012-11-30

  • 分类号H01L21/66;

  • 国家 DE

  • 入库时间 2022-08-21 16:21:53

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