Method for manufacturing resistive particle sensor for monitoring diesel particulate filter in diesel car, involves forming electrode structures on substrate such that electrode structures are electrically disconnected from each other

摘要

The method involves applying a conductive material layer (10) on a substrate (20). The conductive material layer is patterned by an energetic beam such that a portion of the conductive material is removed from the conductive material layer. A first electrode structure (11) and a second electrode structure (12) are formed such that the electrode structures are electrically disconnected from each other on the substrate.