THIN FILM SURGE ABSORBER, THIN FILM DEVICE, AND METHOD FOR MANUFACTURING THEM

摘要

PROBLEM TO BE SOLVED: To provide a thin film absorber and a thin film device, capable of effectively increasing resistance against static electricity and capable of improving reliability, and a method for manufacturing the thin film absorber and the thin film device.;SOLUTION: A thin film device 1 includes: a substrate 2; and a conductive layer 3 formed on the substrate 2 and including a pair of electrodes 31a, 31b disposed to have a predetermined gap therebetween, a pair of discharge electrodes 32a, 32b disposed to face each other with a discharge gap therebetween, and terminal electrodes 33a, 33b connected to the electrodes 31a, 31b and the discharge electrodes 32a, 32b via conduction paths 34a, 34b, 35a, 35b. The thin film device further includes: a thin film element layer 4 connected to the pair of electrodes 31a, 31b; and a protective insulation layer 5 having a cavity Ct at least facing the discharge gap in the pair of discharge electrodes 32a, 32b and coating the thin film element layer 4 and the pair of discharge electrodes 32a, 32b.;COPYRIGHT: (C)2014,JPO&INPIT